2009 Mems Inertial Sensors Status And Trends Of 2010

Inertial sensors including accelerometers (or accelerometer sensor of dollars) and the angular rate sensor (gyroscope) and their single, double, three-axis combined IMU (Inertial Measurement Unit), AHRS (including magnetic sensor attitude reference system).

Is the use of MEMS accelerometer inertial sensing the quality of force measurement sensor, the general standard of quality from the block (sensor element) and the detection circuit. According to the different sensing principle, mainly piezoresistive, capacitive, piezoelectric type, the tunnel current-type, resonance type, thermal and electromagnetic coupling type and so on.

In 1998, the United States CSDL design and development of the first MEMS gyroscope. In the same year, Drapor lab developed another form of MEMS gyroscope.

MEMS gyroscope is the use of vibration-mass has been the base (shell) driven rotation of the Coriolis effect to the principle of the angular velocity sensor is made.

Mainly in the form of framework-driven (inside and outside the framework of the two kinds) comb-drive type, electromagnetic-driven and so on.

IMU because it is combination of MEMS technology, micro-inertial measurement unit, so many places called MIMU. Mainly by the three MEMS accelerometers and three gyro and the solver circuit.

AHRS consists of three magnetic sensors, compared with the IMU, and based on four elements in France to understand calculation, can output directly to a sports body pitch angle, roll angle and heading angle.

Low-precision MEMS inertial sensors, as consumer electronics products are mainly used in mobile phones, game consoles, music players, wireless mouse, digital cameras, PD, hard disk protector, smart toys, pedometer, anti-theft system, GPS navigation, portable. Because of acceleration measurement, tilt measurement, vibration measurement and even rotational measurements and other basic measurements, to be excavated consumer electronics applications will continue to emerge.

Intermediate grade MEMS inertial sensors for industrial and automotive grade products, are mainly used in automotive electronic stability systems (ESP or ESC) GPS-assisted navigation systems, automobile airbags, vehicle attitude measurement, precision agriculture, industrial automation, large-scale medical equipment, robotics , instruments | instruments and meters, construction machinery and so on.

High-precision MEMS inertial sensors as a military-grade and aerospace level products, the main demand high precision, the whole temperature range, shock and other indices. Mainly used in wireless communications satellite, missile seeker, optical targeting systems, stability of the applications; aircraft / missile flight control, attitude control, yaw damping control applications, as well as medium-range missile guidance, inertial-guided GPS navigation applications, remote aircraft ship equipment, battlefield robots.

For consumer electronics of MEMS inertial sensors, the main requirement is that the low price, small size, narrow temperature range, so accuracy is low, or even functional products. Acceleration sensors, light weight, power consumption is small, generally measuring range 1 ~ 10g ~ 50g, Resolution 2mg ~ 10mg, top general in the range ± 300 ° / s, zero-bias in the 500 ° / h ~ 1000 ° / h, so some companies products do not give a zero bias indicators or to give 0.1 ° / s ~ 0.5 ° / s.

MEMS accelerometer can be produced at present the companies are more, most of the semiconductor, such as the United States, ADI, Invensense, ST, Freescale, Sensor Dynamics, MSI (ICSensor), MEMSIC (producer in Wuxi, China) Europe, VTI, Infine, production MEMS gyroscope’s the United States, ADI, Knoix, ST, Europe, Infine, Methes, Japan, Murata, National, Oki, Fujitsu. December 3 Di Semiconductor Co., Ltd. Shenzhen, Shanghai, China issued a consumer-grade MEMS gyro, a company in Wuxi is also in development.